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Effect of silicon addition on surface morphology and structural properties of titanium nitride films grown by reactive unbalanced direct current-magnetron sputtering
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- Journal:
- Journal of Materials Research / Volume 19 / Issue 2 / February 2004
- Published online by Cambridge University Press:
- 03 March 2011, pp. 523-534
- Print publication:
- February 2004
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- Article
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