2 results
Simulation of Focused Ion Beam Induced Damage Formation in Crystalline Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 792 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, R10.10
- Print publication:
- 2003
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- Article
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FIB-TEM Characterization of Locally Restricted Implantation Damage
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- Journal:
- MRS Online Proceedings Library Archive / Volume 738 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, G7.14
- Print publication:
- 2002
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- Article
- Export citation