3 results
Characterization of Porous Silicate Low-k Films by Ellipsometric Porosimetry and Variable-energy Positron Annihilation Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 788 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, L8.19
- Print publication:
- 2003
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Point defects in thin HfAlOx films probed by monoenergetic positron beams
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- Journal:
- MRS Online Proceedings Library Archive / Volume 786 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E1.2
- Print publication:
- 2003
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Study of Pore Architecture in Silicon Oxide Thin Films by Variable-energy Positron Annihilation Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 751 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, Z3.31
- Print publication:
- 2002
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