3 results
Effect of Oxygen on the Formation of Dryetching Damage Introduced into Si-Substrate
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- Journal:
- MRS Online Proceedings Library Archive / Volume 510 / January 1998
- Published online by Cambridge University Press:
- 10 February 2011, 513
- Print publication:
- January 1998
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- Article
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Effects Of Gettering On Device Characteristics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 442 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 175
- Print publication:
- 1996
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- Article
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Comparison Of Gettering Ability between I/I Defects And Si Substrate
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- Journal:
- MRS Online Proceedings Library Archive / Volume 442 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 181
- Print publication:
- 1996
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- Article
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