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Photoluminescence Study of Damage Introduced in GaN by Ar- and Kr-Plasmas Etching
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1396 / 2012
- Published online by Cambridge University Press:
- 29 December 2011, mrsf11-1396-o07-36
- Print publication:
- 2012
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- Article
- Export citation