11 results
The Effect of Interfacial Chemistry on Metal Ion Penetration into Polymeric Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 734 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, B9.60
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- 2002
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Directions in the Chemical Mechanical Planarization Research
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- Journal:
- MRS Online Proceedings Library Archive / Volume 566 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 3
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- 1999
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Chemical-Mechanical Polishing of Polymer Films: Comparison of Benzocyclobutene(BCB) and Parylene-N Films by XPS and AFM
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- Journal:
- MRS Online Proceedings Library Archive / Volume 476 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 161
- Print publication:
- 1997
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Low Dielectric Constant Polymers For On-Chip Interlevel Dielectrics With Copper Metallization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 381 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 177
- Print publication:
- 1995
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The Stability of TiH2 Used as Diffusion Barrier on SiO2 Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 217
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- 1994
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Basic Science in Silica Glass Polishing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 89
- Print publication:
- 1994
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Copper Metallization Manufacturing Issues for Future ICs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 41
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- 1994
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Barriers to Strain Relaxation in Epitaxial Fluorides on Si(111)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 308 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 451
- Print publication:
- 1993
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The Surface Morphology of Titanium Nitride / Copper Bilayers Annealed at High Temperatures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 318 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 451
- Print publication:
- 1993
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Reactions of Titanium Films with thin Silicon Dioxide, Nitride, and Oxynitride Films During Rapid Thermal Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 665
- Print publication:
- 1992
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Interaction of Copper Film with Silicides
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- Journal:
- MRS Online Proceedings Library Archive / Volume 181 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 537
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- 1990
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