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High Temperature Reproducible Preparation of Mg2Si Films on (001)Al2O3 substrates Using RF Magnetron Sputtering Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1642 / 2014
- Published online by Cambridge University Press:
- 16 May 2014, mrsf13-1642-bb07-04
- Print publication:
- 2014
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- Article
- Export citation