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Thin Film Heater on a Thermally Isolated Microstructure
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- Journal:
- MRS Online Proceedings Library Archive / Volume 276 / 1992
- Published online by Cambridge University Press:
- 15 February 2011, 277
- Print publication:
- 1992
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The Effect of HCl on Silicon Point Defect Formation During Thermal Oxidatign of (100) Float Zone Silicon Wafers: A Theoretical Analysis
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- Journal:
- MRS Online Proceedings Library Archive / Volume 71 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 39
- Print publication:
- 1986
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- Article
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