3 results
Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 811 / 2004
- Published online by Cambridge University Press:
- 28 July 2011, D1.9
- Print publication:
- 2004
-
- Article
- Export citation
Atomic Layer Deposition of Hafnium Oxide Thin Films from Tetrakis(dimethylamino)Hafnium (TDMAH) and Ozone
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 765 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, D3.8
- Print publication:
- 2003
-
- Article
- Export citation
SrBi2Ta2O9 thin films made by liquid source metal-organic chemical vapor deposition
-
- Journal:
- Journal of Materials Research / Volume 12 / Issue 3 / March 1997
- Published online by Cambridge University Press:
- 31 January 2011, pp. 783-792
- Print publication:
- March 1997
-
- Article
- Export citation