2 results
Nanoscale strain characterization in microelectronic materials using X-ray diffraction
-
- Journal:
- Powder Diffraction / Volume 25 / Issue 2 / June 2010
- Published online by Cambridge University Press:
- 29 February 2012, pp. 108-113
-
- Article
- Export citation
Real-space strain mapping of SOI features using microbeam X-ray diffraction
-
- Journal:
- Powder Diffraction / Volume 23 / Issue 2 / June 2008
- Published online by Cambridge University Press:
- 29 February 2012, pp. 106-108
-
- Article
- Export citation