2 results
Formation of Excess Donors During High-Dose 74Ge+ Ion Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 354 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 261
- Print publication:
- 1994
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- Article
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Effect of Preamorphization Depth on Channeling Tails in B+ and As+ Implanted Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 45 / 1985
- Published online by Cambridge University Press:
- 25 February 2011, 39
- Print publication:
- 1985
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- Article
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