3 results
Phase Diagrams for the Optimization of rf Plasma Enhanced Chemical Vapor Deposition of a-Si:H: Variations in Plasma Power and Substrate Temperature
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 664 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, A5.4
- Print publication:
- 2001
-
- Article
- Export citation
Study of the Amorphous-to-Microcrystalline Transition during Silicon Film Growth at Increased Rates: Extensions of the Evolutionary Phase Diagram
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 609 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, A2.2
- Print publication:
- 2000
-
- Article
- Export citation
Real Time Optics of p-Type Microcrystalline Silicon Deposition On Specular and Textured ZnO-Coated Glass
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 609 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, A19.6
- Print publication:
- 2000
-
- Article
- Export citation