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Recent Improvements in Dry Etching of Hg1−xCdxTe By Ch4 Based Electron Cyclotron Resonance Plasmas
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- Journal:
- MRS Online Proceedings Library Archive / Volume 487 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 637
- Print publication:
- 1997
-
- Article
- Export citation
Recent Improvements in Dry Etching of Hg1−xCdxTe by CH4 Based Electron Cyclotron Resonance Plasmas
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 484 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 259
- Print publication:
- 1997
-
- Article
- Export citation