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Scanning probe microscopy generated out-of-plane deformation maps exhibiting heterogeneous nanoscale deformation resulting from thermal cycling of Cu–polyimide damascene interconnects
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- Journal:
- Journal of Materials Research / Volume 16 / Issue 12 / December 2001
- Published online by Cambridge University Press:
- 31 January 2011, pp. 3560-3566
- Print publication:
- December 2001
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- Article
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