4 results
Characterization of 3D Dopant Distribution in State of the Art FinFET Structures
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- Journal:
- Microscopy and Microanalysis / Volume 19 / Issue S2 / August 2013
- Published online by Cambridge University Press:
- 09 October 2013, pp. 960-961
- Print publication:
- August 2013
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- Article
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Properties of Phase Change Materials Modified by Ion Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1338 / 2011
- Published online by Cambridge University Press:
- 13 July 2011, mrss11-1338-r05-06
- Print publication:
- 2011
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Ion implantation of Carbon and Silicon into Ge2Sb2Te5: Ion Profiles and Post Crystallization Redistribution
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1338 / 2011
- Published online by Cambridge University Press:
- 20 July 2011, mrss11-1338-r05-07
- Print publication:
- 2011
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Experimental Study on the Mechanism of Carbon Diffusion in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 717 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, C5.10
- Print publication:
- 2002
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