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Investigation of the Growth and Chemical Stability of Composite Metal Gates on Ultra-thin Gate Dielectrics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 532 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 171
- Print publication:
- 1998
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Chemical Stability of Advanced Metal Gate and Ultra-thin Gate Dielectric Interface During Rapid Thermal Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 525 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 219
- Print publication:
- 1998
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- Article
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