2 results
Characterization and Metrology of Low Pressure Chemical Vapor Deposited (LPCVD) Polysilicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 452 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 1013
- Print publication:
- 1996
-
- Article
- Export citation
Characterization of the Thin Oxide-Nitride-Oxide (ONO) Structure Using Spectroscopic Ellipsometry
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 358 / 1994
- Published online by Cambridge University Press:
- 28 February 2011, 1029
- Print publication:
- 1994
-
- Article
- Export citation