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Improvements in Zone Melt Recrystallized Soi Layers by the Use of Selective Epitaxial Growth in the Seed Windows.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 107 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 189
- Print publication:
- 1987
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- Article
- Export citation
Selective Epitaxial Growth Followed by in Situ Deposition of a- or Poly-Si for Seeded Soi.
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 107 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 231
- Print publication:
- 1987
-
- Article
- Export citation