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Texture Evolution in Si/SiC Layered Structures Deposited on Si(001) by Chemical Vapor Deposition
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- Journal:
- Journal of Materials Research / Volume 13 / Issue 9 / September 1998
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2632-2642
- Print publication:
- September 1998
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- Article
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