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A comparison of C54-TiSi2 formation in blanket and submicron gate structures using in situ x-ray diffraction during rapid thermal annealing
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- Journal:
- Journal of Materials Research / Volume 10 / Issue 9 / September 1995
- Published online by Cambridge University Press:
- 03 March 2011, pp. 2355-2359
- Print publication:
- September 1995
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- Article
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