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Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge
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- Journal:
- Journal of Materials Research / Volume 26 / Issue 9 / 14 May 2011
- Published online by Cambridge University Press:
- 19 April 2011, pp. 1076-1080
- Print publication:
- 14 May 2011
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- Article
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