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A Low Frequency Remote Plasma Rapid Thermal CVD System with Face Down Electrostatic Clamp Wafer Holder
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- Journal:
- MRS Online Proceedings Library Archive / Volume 303 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 407
- Print publication:
- 1993
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- Article
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An Optimization Study of Thermal Stability of W/GaAs Schottky Gates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 300 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 273
- Print publication:
- 1993
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- Article
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