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Deposition and Characterization of In-Situ Boron Doped Polycrystalline Silicon Films for Microelectromechanical Systems Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 605 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 31
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- 1999
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Influence of Surface Pre-Cleaning on Electrical Properties of Rapid Thermal Oxide and Rapid Thermal Chemical Vapor Deposition Oxide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 81
- Print publication:
- 1992
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Investigation of the Hydrogen Content of Silicon in an Integrated Rapid Thermal Processing Reactor
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- Journal:
- MRS Online Proceedings Library Archive / Volume 282 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 481
- Print publication:
- 1992
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