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Nanoindentation of Silicate Low-K Dielectric Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B12.13
- Print publication:
- 2002
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- Article
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Thin Film Mechanical Properties Through Nano-Indentation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 522 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 317
- Print publication:
- 1998
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- Article
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