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Synthesis of B-C-N Thin Films by Ion-Beam-Assisted Deposition and Their Mechanical Properties
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- Journal:
- MRS Online Proceedings Library Archive / Volume 647 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, O11.5
- Print publication:
- 2000
-
- Article
- Export citation
Effect of Substrate Materials on Mechanical Properties and Microstructure of Carbon Nitride Films Prepared by Ion-beam-assisted deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 647 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, O11.8
- Print publication:
- 2000
-
- Article
- Export citation