3 results
Windowless Wide Area Vuv Lamp for Energy Assisted CVD*
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- Journal:
- MRS Online Proceedings Library Archive / Volume 129 / 1988
- Published online by Cambridge University Press:
- 25 February 2011, 227
- Print publication:
- 1988
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Chemical Vapor Deposition of Silicon Insulating Films Induced with a Perpendicular Electron Beam
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- Journal:
- MRS Online Proceedings Library Archive / Volume 38 / 1984
- Published online by Cambridge University Press:
- 21 February 2011, 357
- Print publication:
- 1984
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- Article
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Beam-Assisted CVD of Microelectronic Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 29 / 1983
- Published online by Cambridge University Press:
- 21 February 2011, 81
- Print publication:
- 1983
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- Article
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