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The Use of Disordered Interlayers to Enhance Nucleation of Silicon Nitride During Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 403 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 107
- Print publication:
- 1995
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Nucleation and Growth of Cvd Polycrystalline Si3N4 Films at Low Temperatures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 287 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 315
- Print publication:
- 1992
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