3 results
Routes to the Formation of Air Gap Structures Using PECVD
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F10-02
- Print publication:
- 2006
-
- Article
- Export citation
Impact of Pore Size and Morphology of Porous Organosilicate Glasses on Integrated Circuit Manufacturing
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F01-02
- Print publication:
- 2006
-
- Article
- Export citation
Plasma Enhanced Chemical Vapor Deposition of Porous Organosilicate Glass ILD Films With k ≤ 2.4.
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 766 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E7.4
- Print publication:
- 2003
-
- Article
- Export citation