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Micro-electronic devices analysis by high resolution transmission electron microscopy
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- Journal:
- Revue de Métallurgie – International Journal of Metallurgy / Volume 100 / Issue 5 / May 2003
- Published online by Cambridge University Press:
- 17 November 2003, pp. 477-494
- Print publication:
- May 2003
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Charge Trapping Properties of Thin Plasma Nitrided Oxides Induced by Nitrogen and Hydrogen Incorporation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 284 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 325
- Print publication:
- 1992
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FT-IR, Sims and Electrical Characterization of Si3N4 Thin Films Obtained from C.V.D. Assisted by In-Situ Electrical Discharge
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- Journal:
- MRS Online Proceedings Library Archive / Volume 284 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 39
- Print publication:
- 1992
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