2 results
AFM Measurements of Adhesion between CMP Slurry Particles and Copper
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F12-05
- Print publication:
- 2006
-
- Article
- Export citation
AFM Measurements of Adhesion between Actual CMP Slurry Particles and Various Substrates
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W2.5
- Print publication:
- 2005
-
- Article
- Export citation