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Feasibility Study for Usage of Diluted Fluorine for Chamber Clean Etch Applications as an Environmental Friendly Replacement of NF3
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F09-23
- Print publication:
- 2006
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Hamburg University Radiocarbon Dates III
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- Journal:
- Radiocarbon / Volume 26 / Issue 2 / 1984
- Published online by Cambridge University Press:
- 18 July 2016, pp. 196-205
- Print publication:
- 1984
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- Article
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