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Defects and Failure Modes in PZT Films for a MEMS Microengine
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- Journal:
- MRS Online Proceedings Library Archive / Volume 657 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, EE4.4
- Print publication:
- 2000
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- Article
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Friction Measurement in MEMS Using a New Test Structure
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- Journal:
- MRS Online Proceedings Library Archive / Volume 605 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 129
- Print publication:
- 1999
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- Article
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