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Step Coverage and Material Properties of CVD Titanium Nitride Films from TDMAT and TDEAT Organic Precursors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 355 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 323
- Print publication:
- 1994
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- Article
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Simulation of Collimated Titanium Nitride Physical Vapor Deposition using EVOLVE
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 547
- Print publication:
- 1994
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- Article
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