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Optimized Materials Properties for Organosilicate Glasses Produced by Plasma-Enhanced Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 766 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E8.17
- Print publication:
- 2003
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- Article
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Organofluorosilicate Glass (OFSG): A Dense Low K Dielectric with Superior Materials Properties
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- Journal:
- MRS Online Proceedings Library Archive / Volume 766 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E7.3
- Print publication:
- 2003
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- Article
- Export citation