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Analysis of Teos Silicon Dioxide: The Identification of Carbonatious Contaminants
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- Journal:
- MRS Online Proceedings Library Archive / Volume 500 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 97
- Print publication:
- 1997
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- Article
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The Influence of Ionic Activity on the Electrical Properties of PECVD (TEOS) Silicon Dioxide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 500 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 93
- Print publication:
- 1997
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- Article
- Export citation