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S65 Application of Energy-Dispersive Diffraction to the Analysis of Highly Inhomogeneous Residual Stress Fields in Thin Film Structures

Published online by Cambridge University Press:  20 May 2016

M. Klaus ,
W. Reimers  and
Ch. Genzel
M. Klaus
Affiliation:
Technische Universität Berlin, Berlin, Germany
W. Reimers
Affiliation:
Technische Universität Berlin, Berlin, Germany
Ch. Genzel
Affiliation:
Hahn-Meitner-Institut Berlin, Berlin, Germany
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Abstract

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Type
DENVER X-RAY CONFERENCE
Information
Powder Diffraction , Volume 23 , Issue 2 , June 2008 , pp. 187
Copyright
Copyright © Cambridge University Press 2008

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