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C22 Quantitative Sub-100nm Phase-Contrast Imaging Using an SEM-Based Full-Field X-ray Microscope—Invited

Published online by Cambridge University Press:  20 May 2016

S.W. Wilkins
Affiliation:
CSIRO, Manufacturing & Infrastructure Technology, Clayton, Australia
D. Gao
Affiliation:
CSIRO, Manufacturing & Infrastructure Technology, Clayton, Australia
T.E. Gureyev
Affiliation:
CSIRO, Manufacturing & Infrastructure Technology, Clayton, Australia
S.C. Mayo
Affiliation:
CSIRO, Manufacturing & Infrastructure Technology, Clayton, Australia
P.R. Miller
Affiliation:
CSIRO, Manufacturing & Infrastructure Technology, Clayton, Australia
Y. Nesterets
Affiliation:
CSIRO, Manufacturing & Infrastructure Technology, Clayton, Australia
D. Parry
Affiliation:
CSIRO, Manufacturing & Infrastructure Technology, Clayton, Australia
A. Pogany
Affiliation:
CSIRO, Manufacturing & Infrastructure Technology, Clayton, Australia
A.W. Stevenson
Affiliation:
CSIRO, Manufacturing & Infrastructure Technology, Clayton, Australia
D. Paganin
Affiliation:
CSIRO, Manufacturing & Infrastructure Technology, Clayton, Australia and Monash University, Clayton, Australia

Abstract

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Type
Denver X-Ray Conference
Copyright
Copyright © Cambridge University Press 2005

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