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Xafs Study on Interfaces in III-V Semiconductor Heterostructures
Published online by Cambridge University Press: 25 February 2011
Abstract
Interfaces in InGaAs/InP heterostructures were investigated by XAFS analysis using synchrotron radiation. Two types of InGaAs/InP heterostructures were made by MEE using Ga, In, AsH3 and PH3 as sources. These InGaAs layers were terminated by (a) InGa and (b) As. The local structures around P were investigated by fluorescent XAFS analysis. It shows that the nearest neighbor around P is Ga and In in the InGa (a) sample and mainly In in the As (b) sample.
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