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UV Assisted Rapid Thermal Processing of Strontium Bismuth Tantalate (SBT) Thin Films

Published online by Cambridge University Press:  01 February 2011

S. O'Brien ,
P. K. Hurley ,
G. M. Crean ,
J. Johnson ,
C. Caputa  and
D. Wouters
S. O'Brien
Affiliation:
NMRC, University College Cork, Lee Maltings, Prospect Row, Cork, Ireland.
P. K. Hurley
Affiliation:
NMRC, University College Cork, Lee Maltings, Prospect Row, Cork, Ireland.
G. M. Crean
Affiliation:
NMRC, University College Cork, Lee Maltings, Prospect Row, Cork, Ireland.
J. Johnson
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
C. Caputa
Affiliation:
STMicroelectronics, Stradale Primosole, 95121, Catania-Italy
D. Wouters
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Abstract

A novel technique termed UV-assisted RTP has been developed and found to offer improvement in material properties, in particular when applied to thin films. Regarding crystallization of SBT, a number of UV-RTP strategies were developed and evaluated. It was demonstrated that UV irradiation of the sample material at a temperature in excess of the MOCVD deposition temperature was found to produce a significant increase in Pr.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 830: Symposium D – Materials and Processes for Nonvolatile Memories , 2004 , D3.18
Copyright
Copyright © Materials Research Society 2005

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References

REFERENCES

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