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The Structure and Electric Field Dependent Dielectric Properties of Annealed Sr1−xBaxTio3 Ferroelectric Thin Films

Published online by Cambridge University Press:  15 February 2011

L.A. Knauss ,
J.M. Pond ,
J.S. Horwitz ,
C.H. Mueller ,
R.E. Treece  and
D.B. Chrisey
L.A. Knauss
Affiliation:
NRL/NRC Cooperative Research Associate
J.M. Pond
Affiliation:
Naval Research Laboratory, Code 6670, 4555 Overlook Ave., SW, Washington, DC 20375
J.S. Horwitz
Affiliation:
Naval Research Laboratory, Code 6670, 4555 Overlook Ave., SW, Washington, DC 20375
C.H. Mueller
Affiliation:
SCT, 720 Corporate Circle, Golden, CO 80401
R.E. Treece
Affiliation:
SCT, 720 Corporate Circle, Golden, CO 80401
D.B. Chrisey
Affiliation:
Naval Research Laboratory, Code 6670, 4555 Overlook Ave., SW, Washington, DC 20375
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Abstract

The effect of a post deposition anneal on the structure and dielectric properties of epitaxial Sr1−x, BaxTiO3 (SBT) thin films with x = 0.35, 0.50 and 0.60 has been measured. The films were grown by pulsed laser deposition on LaAlO3(001) substrates at 750°C in 350 mTorr of oxygen. The asdeposited films were single phase, (001) oriented with 0)-scan widths for the (002) reflection between 0.160 and 0.50'. The dielectric properties of the as-deposited films exhibit a broad temperature dependence and a peak which is as much as 50 K below the peak in bulk SBT. Also, the lattice parameter, as measured by x-ray diffraction, of the as-deposited films was larger than the bulk indicating strain in the films. The as-deposited films were annealed for 8 hours at 900°C in oxygen. The dielectric properties of the annealed films were closer to that of bulk SBT and the lattice parameter was closer to the bulk lattice parameter indicating a reduction of strain. Annealing of as-deposited films also resulted in an increased dielectric tuning without increased dielectric loss.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 401: Symposium G – Epitaxial Oxide Thin Films II , 1995 , 189
Copyright
Copyright © Materials Research Society 1996

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References

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