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Site-specific cross-sectioning of carbon nanotube-to-metal junctions for high spatial resolution chemical and structural analysis

Published online by Cambridge University Press:  11 February 2011

K. Dovidenko ,
N. L. Abramson  and
J. Rullan
K. Dovidenko
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
N. L. Abramson
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
J. Rullan
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
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Abstract

In this study, we have demonstrated successful site-specific cross-sectioning of carbon-nanotube - metal junctions which provided samples suitable for high resolution transmission electron microscopy and electron energy loss spectroscopy. For the cross-sectioning, we have suggested a modified technique based on combination of the Focused Ion Beam (FIB) lift-out and the conventional Ar+ ion milling techniques. Electron-transparent cross-sections of multiwall carbon nanotubes showing no significant surface amorphization or Ga contamination (typical artifacts of conventional FIB lift-out technique) were obtained. High-resolution transmission electron microscopy and electron energy loss spectroscopy of a multi-wall carbon nanotube cross-section have been carried out.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 761: Symposia B/C/D/F/G/NN – Molecular Electronics , 2002 , G7.30
Copyright
Copyright © Materials Research Society 2003

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References

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