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Radiation-Induced Deep-Level Traps in CCD Image Sensors
Published online by Cambridge University Press: 01 February 2011
Abstract
Dark current spectroscopy (DCS) is used to study deep level traps corresponding to the bright pixels that form the histogram “tails” of irradiated charge-coupled devices (CCD). We found four distinct traps, among which the double vacancy (V2) and the vacancy-phosphorous (VP) have the highest concentrations and generation rates. We show that DCS can be used to examine the annealing mechanisms of silicon defects to concentrations as low as 5 × 107 cm−3.
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- Copyright © Materials Research Society 2007
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