Published online by Cambridge University Press: 10 February 2011
Using EELS profiling, CaO planar faults of 1.36 nm spacing in CaTiO3 are resolved. Effective probe size was measured as 1.3 nm by quantitative analysis of EELS profiles, which is remarkably larger than 0.5 nm resolution for Z-contrast in similar conditions. Delocalization in EELS is the origin for this discrepancy, and strong elastic scattering near zone axis plays an important role in the quantification of profiles. Suitable spectrum subtraction successfully separates ELNES signal from the fault in one atomic distance with rock-salt structure. ELNES profiles for different local structures are also achieved. These examples demonstrate that EELS analysis can be performed reliably approaching atomic level, beyond the limit of probe size.