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Molecular Dynamics Study of Ion Impact Phenomena and Compressive Stress in Thin Films

Published online by Cambridge University Press:  15 February 2011

N.A. Marks ,
P. Guan ,
D.R. Mckenzie  and
B.A. PailThorpe
N.A. Marks
Affiliation:
School of Physics, University of Sydney, NSW, 2006, Australia.
P. Guan
Affiliation:
School of Physics, University of Sydney, NSW, 2006, Australia.
D.R. Mckenzie
Affiliation:
School of Physics, University of Sydney, NSW, 2006, Australia.
B.A. PailThorpe
Affiliation:
School of Physics, University of Sydney, NSW, 2006, Australia.
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Abstract

Molecular dynamics simulations of nickel and carbon have been used to study the phenomena due to ion impact. The nickel and carbon interactions were described using the Lennard-Jones and Stillinger-Weber potentials respectively. The phenomena occurring after the impact of 100 e V to 1 keV ions were studied in the nickel simulations, which were both two and three-dimensional. Supersonic focussed collision sequences (or focusons) were observed, and associated with these focusons were unexpected sonic bow waves, which were a major energy loss mechanism for the focuson. A number of 2D carbon films were grown and the stress in the films as a function of incident ion energy was Measured. With increasing energy the stress changed from tensile to compressive and reached a maximum around 50 eV, in agreement with experiment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 317: Symposium B – Mechanisms of Thin Film Evolution , 1993 , 497
Copyright
Copyright © Materials Research Society 1994

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