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Microstructure of SrTiO3 Thin Films as Single Layer and Incorporated in Yba2Cu3O7-x/SrTiO3 Multilayers

Published online by Cambridge University Press:  15 February 2011

L. Ryen ,
E. Olssoni ,
L. D. Madsen ,
C. N. L. Johnson ,
X. Wang ,
S. N. Jacobsen ,
U. Helmersson ,
L.-D. Wernlund  and
S. Rudner
L. Ryen
Affiliation:
Department of Physics, Chalmers University of Technology, S-412 96 Göteborg, Sweden
E. Olssoni
Affiliation:
Department of Physics, Chalmers University of Technology, S-412 96 Göteborg, Sweden
L. D. Madsen
Affiliation:
Department of Physics, Link6ping University, S-581 83 Linköping, Sweden
C. N. L. Johnson
Affiliation:
Department of Physics, Link6ping University, S-581 83 Linköping, Sweden
X. Wang
Affiliation:
Department of Physics, Link6ping University, S-581 83 Linköping, Sweden
S. N. Jacobsen
Affiliation:
Department of Physics, Link6ping University, S-581 83 Linköping, Sweden
U. Helmersson
Affiliation:
Department of Physics, Link6ping University, S-581 83 Linköping, Sweden
L.-D. Wernlund
Affiliation:
National Defence Research Establishment, Box 1165, S-581 11 Linköping, Sweden
S. Rudner
Affiliation:
Department of Physics, Link6ping University, S-581 83 Linköping, Sweden National Defence Research Establishment, Box 1165, S-581 11 Linköping, Sweden
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Abstract

Epitaxial single layer (001) SrTiO3 films and an epitaxial Yba2Cu3O7-x/SrTiO3 multilayer were dc and rf sputtered on (110)rhombohedral LaAIO3 substrates. The microstructure of the films was characterised using transmission electron microscopy. The single layer SrTiO3 films exhibited different columnar morphologies. The column boundaries were due to the lattice mismatch between film and substrate. The boundaries were associated with interfacial dislocations at the film/substrate interface, where the dislocations relaxed the strain in the a, b plane. The columns consisted of individual subgrains. These subgrains were misoriented with respect to each other, with different in-plane orientations and different tilts of the (001) planes. The subgrain boundaries were antiphase or tilt boundaries.

The individual layers of the Yba2Cu3O7-x/SrTiO3 multilayer were relatively uniform. A distortion of the SrTiO3 unit cell of 0.9% in the ‘001’ direction and a Sr/Ti ratio of 0.62±0.04 was observed, both in correspondence with the single layer SrTiO3 films. Areas with different tilt of the (001)-planes were also present, within each individual SrTiO3 layer.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 401: Symposium G – Epitaxial Oxide Thin Films II , 1995 , 369
Copyright
Copyright © Materials Research Society 1996

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References

1. Vendik, O. G., Ter-Martirosyanm, L. T., Dedyk, A. I., Karmenko, S. F. and Chakalov, R. A., Ferroelectrics 144, 33 (1993).Google Scholar
2. Landolt-Bmrnstein Numerical Data and Functional Relationships in Science and Technology, eds. Hellwege, K. H. and Hellwege, A. M., New Series Vol.16 (Springer Verlag, New York, 1981), p. 308.Google Scholar
3. Yamamichi, S., Sakuma, T., Takemura, K. and Miyasaka, Y., Jpn. J. Appl. Phys. 30 (1–9B), 2193 (1991).Google Scholar
4. Yamaguchi, H., Matsubara, S. and Miyasaka, Y., Jpn. J. Appl. Phys. 30 (1–9B), 2197 (1991).Google Scholar
5. Madsen, L. D., Johnson, C. N. L., Jacobsen, S. N., Helmersson, U., Rudner, S., Ivanov, I., Wernlund, L.- D., Olsson, E. and Ryen, L., Microelectronic Eng. (Dec. 1995).Google Scholar
6. Ryen, L., Olsson, E., Madsen, L. D., Jacobsen, S. N., Wang, X., Johnson, C. N. L., Helmersson, U., Rudner, S. and Wernlund, L.-D., Microelectronic Eng. (Dec. 1995).Google Scholar
7. Johnson, C. N. L., Helmersson, U., Madsen, L. D., Rudner, S. and Wernlund, L.-D., J. Appl. Phys. 77 (12), 6388–6393 (1995).Google Scholar
8. Selinder, T. I., Helmersson, U., Han, Z., and Wallenberg, L. R., Thin Solid Films 229, 237 (1993).Google Scholar