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Microstructural and Vibrational Characterization of the Hydrogenated Amorphous Silicon Powders

Published online by Cambridge University Press:  01 January 1993

J. Costa ,
G. Sardin ,
J. Campmany ,
J.L. Andújar ,
A. Canillas  and
E. Bertran
J. Costa
Affiliation:
Departament de Física Aplicada i Electrònica., Universitat de Barcelona., Av. Diagonal, 647. E08028 Barcelona, Catalonia (Spain)
G. Sardin
Affiliation:
Departament de Física Aplicada i Electrònica., Universitat de Barcelona., Av. Diagonal, 647. E08028 Barcelona, Catalonia (Spain)
J. Campmany
Affiliation:
Departament de Física Aplicada i Electrònica., Universitat de Barcelona., Av. Diagonal, 647. E08028 Barcelona, Catalonia (Spain)
J.L. Andújar
Affiliation:
Departament de Física Aplicada i Electrònica., Universitat de Barcelona., Av. Diagonal, 647. E08028 Barcelona, Catalonia (Spain)
A. Canillas
Affiliation:
Departament de Física Aplicada i Electrònica., Universitat de Barcelona., Av. Diagonal, 647. E08028 Barcelona, Catalonia (Spain)
E. Bertran
Affiliation:
Departament de Física Aplicada i Electrònica., Universitat de Barcelona., Av. Diagonal, 647. E08028 Barcelona, Catalonia (Spain)
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Abstract

Hydrogenated nanophase silicon powders prepared by low pressure and low temperature rf plasma using pure silane gas, have been characterized by transmission electron microscopy (TEM), Fourier transform IR spectroscopy (FTIR) and thermal desorption spectrometry (TDS) of hydrogen. By means of these analysis, the evolution of the hydrogen bonds and the oxidation processes as a consequence of annealing of the silicon powders under vacuum or atmospheric conditions have been investigated. The TDS results reveal the fundamental differences between the concentrations of hydrogen weakly and strongly bonded in silicon powders as compared to amorphous silicon films, and the FTIR spectra evidence the oxidation process taking place in the silicon powders as a consequence of the annealing. These results along with the TEM analysis show that silicon powder particles present intergrain linkage. We also study the silicon powder particles considering their microstructure and vibrational characteristics as well as their degree of polymerization.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 297: Symposium A – Amorphous Silicon Technology - 1993 , 1993 , 1031
Copyright
Copyright © Materials Research Society 1993

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References

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