Hostname: page-component-78c5997874-mlc7c Total loading time: 0 Render date: 2024-11-08T02:38:56.750Z Has data issue: false hasContentIssue false
  • English
  • Français

Meso-Scale Pressure Transducers Utilizing Low Temperature Co-Fired Ceramic Tapes

Published online by Cambridge University Press:  10 February 2011

H. Lynch ,
J. Park ,
P. A. Espinoza-Valejos ,
J. J. Santiago-Aviles  and
L. Sola-Laguna
H. Lynch
Affiliation:
University of villanova, Department of Mechanical Engineering, Villanova, PA, 19085
J. Park
Affiliation:
Raytheon Commercial Electronics, Andover, MA 01810.,[email protected]
P. A. Espinoza-Valejos
Affiliation:
University of Pennsylvania, Dep. of Electrical Engineering, Philadelphia, PA, 19104, [email protected], [email protected].
J. J. Santiago-Aviles
Affiliation:
University of Pennsylvania, Dep. of Electrical Engineering, Philadelphia, PA, 19104, [email protected], [email protected].
L. Sola-Laguna
Affiliation:
DuPont Electronic Materials, RTP, NC 27709, [email protected]
Get access

Abstract

Pressure transducers with promising characteristics at high pressure and temperatures have been developed using low temperature co-fired ceramic (LTCC) tape technology. All parts for the transducer were machined from DuPont 951 series LTCC tapes utilizing either a numerically controlled milling machine, or an isotropic etching technique involving the removal of the glassy binder of a partially sintered LTCC tape. Device dimensions are in the meso (intermediate) scale range, with the smallest device size of 8mm in diameter, and the cavity of 2 mm. Utilizing the anisotropy induced during the casting process a chemical exfoliation technique was developed. This technique allowed us to separate the original tape in three layers, the middle one being highly elastic, isotropic and homogeneous. The middle layer can be chemically thinned to achieve membrane like behavior, with thickness of the order of 50 µm. The pressure is measured as a function of the membrane deformation where two piezo-resistors are screen printed. Two piezo-resistors were used to achieve temperature compensation. Using shrinkage matched paste, nominal thick film technology was used in the screen printing of the piezoresistors. The rest of the transducer was fabricated using several layers of LTCC tapes, which were laminated and fired. Devices of different sizes were fabricated and compared. Devices were characterized by comparing its dynamic response with a micro-fabricated silicon pressure transducer.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 546: Symposium AA – Materials Science of Microelectromechanical Systems (MEMS)… , 1998 , 177
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Green Tape Material systems, DuPont de Nemours & Co. Electronic Technology Center, RTP, NC, 27709, (1994).Google Scholar
[2] Bau, H., Ananthasuresh, S., Santiago-Avilds, J. J., Zhong, J., Kim, M., Yi, M., and Espinoza-Vallejos, P., Sola-Laguna, L., Ceramic Tape-Based Meso Systems Technology, Proceedings of the 1988 ASME International Mechanical Engineering Congress, Nov 15–20 (1998).Google Scholar
[3] Espinoza-Vallejos, P., Zhong, J., Gongora-Rubio, M., Sola-Laguna, L. and Santiago-Avilds, J. J., The Measurement and Control of Sagging in Meso (intermediate scale) electromechanical LTCC Structures and Systems, MRS Conference Proceedings Vol., (1998).Google Scholar
[4] Park, J., Ceramic Tape Technology in Meso-EMS, University of Pennsylvania Electrical Engineering Senior Design Project Final Report, pp. 10. (1998).Google Scholar
[5] Probstein, R. F., Physicochemical Hydrodynamics, An Introduction, Butterworth Publishers 1989.Google Scholar