Hostname: page-component-586b7cd67f-vdxz6 Total loading time: 0 Render date: 2024-12-01T04:08:04.909Z Has data issue: false hasContentIssue false
  • English
  • Français

Large Area Uniform Deposition of YBa2Cu3O7 Thin Films by a 90° Off-axis Sputtering Technique

Published online by Cambridge University Press:  15 February 2011

R. A. Rao ,
Q. Gan  and
C. B. Eom
R. A. Rao
Affiliation:
Department of Mechanical Eng. and Materials Science, Duke University, Durham, NC 27708
Q. Gan
Affiliation:
Department of Mechanical Eng. and Materials Science, Duke University, Durham, NC 27708
C. B. Eom
Affiliation:
Department of Mechanical Eng. and Materials Science, Duke University, Durham, NC 27708
Get access

Abstract

Large area uniform deposition of Yba2Cu3O7 (YBCO) thin films on 8 inch diameter wafers, using a 3 inch diameter sputtering target and optimized substrate rotation in a single target 90° off-axis sputtering technique, is reported. The variation in thickness, composition and superconducting properties was studied as a function of substrate position on stationary and rotating substrates. The films deposited from a 3” target on rotating substrates displayed uniform thickness (< ±5% variation) and composition (< 2.3% deviation from target stoichiometry) and a consistently high transition temperature ( Tc > 88.3°K) over an 8” diameter area.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 401: Symposium G – Epitaxial Oxide Thin Films II , 1995 , 423
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Cole, B. F., Liang, G.-C., Newman, N., Char, K., Zaharchuk, G., and J. S. Martens, Appl. Phys. Lett. 61, 1727 (1992)Google Scholar
2. Rogers, C., Inam, A., Hegde, M. S. Dutta, B., Wu, X. D., and Venkatesan, T., Appl. Phys. Lett. 55, 2032 (1989).Google Scholar
3. Gao, J., Aarnink, W. A. M., Gerritsma, G. J., Veldhuis, D., and Rogalla, H., IEEE Trans. Magn., 27, 3062 (1991).Google Scholar
4. Foltyn, S. T., Muenchausen, R. E., Dye, R. C., Wu, X. D., Luo, L., Cooke, D.W., and Taber, R. C., Appl. Phys. Lett. 59, 1374 (1991).Google Scholar
5. Chern, C. S., Martens, J. S., Li, Y. Q., Gallois, B. M., Lu, P., and Kear, B. H., Supercond. Sci. & Tech.,6, 460 (1993).Google Scholar
6. Norris, P., Zhao, J., AIP Conference Proceedings, 273, 63 (1993).Google Scholar
7. Xi, X.X., Venkatesan, T., Li, Q., Wu, X. D, Inam, A., Chang, C. C., Ramesh, R., Hwang, D. M., Ravi, T. S., Findikoglu, A., Hemmick, D., Etemad, S., Martinez, J.A., and Wilkens, E., IEEE Trans. Magn., 27, 982 (1991).Google Scholar
8. Krliger, U., Kutzner, R., and Wordenweber, R., IEEE Trans. Appl. Supercond., 3, 1687 (1993).Google Scholar
9. Zhang, Y. Z., Li, L., Zhao, Y. Y., Zhao, B. R., Li, J.W., Sun, J. R., Su, Q. X., and Xu, P., Appl. Phys. Lett. 61, 348 (1992).Google Scholar
10. Newman, N., Cole, B. F., Garrison, S. M., Char, K., and Taber, R. C., IEEE Trans. Magn. 27, 1276 (1991).Google Scholar
11. Newman, N., Char, K., Garrison, S. M., Barton, R.W., Taber, R. C., Eom, C. B., Geballe, T. H. and Wilkens, B., Appl. Phys. Lett. 57, 520 (1990).Google Scholar
12. Face, D. W., Wilker, C., Shen, Z.-Y., Pang, P., and Small, R.J., IEEE Trans. Appl. Supercond., 5, 1581 (1995).Google Scholar
13. Kinder, H., Berberich, P., Utz, B., and Prusseit, W., IEEE Trans. Appl. Supercond., 5, 1575 (1995).Google Scholar
14. Kinder, H., Berberich, P., Prusseit, W., Semerad, R. and Utz, B., presented at the International Workshop on Superconductivity June 1995, Program and Extended Abstracts, RII-5, pp. 182.Google Scholar
15. Eom, C.B., Sun, J. Z., Yamamoto, K., Marshall, A. F., Luther, K. E., Laderman, S. S., and Geballe, T. H., Appl. Phys. Lett. 55, 595 (1989).Google Scholar
16. Eom, C. B., Sun, J. Z., Streiffer, S. K., Marshall, A. F., Yamamoto, K., Lairson, B. M., Anlage, S. M., Bravman, J. C., Geballe, T. H., Laderman, S. S., and Taber, R. C., Physica C, 171, 351 (1990).Google Scholar
17. Rossnagel, S.M., and Cuomo, J. J., AlP Conference Proceedings, 165, 106 (1988).Google Scholar
18. Hammond, R.H., and Bormann, R., Physica C, 162–164, 703 (1989).Google Scholar
19. Rao, R.A. and Eom, C.B., to be publishedGoogle Scholar