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Ion Beam Deposition of Amorphous Carbon Films With Diamond Like Properties
Published online by Cambridge University Press: 15 February 2011
Abstract
Carbon films were deposited on silicon, quartz, and potassium bromide substrates from an ion beam. Growth rates were approximately 0.3 μm/hour. The films were featureless and amorphous and contained only carbon and hydrogen in significant amounts. The density and carbon/hydrogen ratio indicate the film is a hydrogen deficient polymer. One possible structure, consistent with the data, is a random network of methylene linkages and tetrahedrally coordinated carbon atoms.
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- Copyright © Materials Research Society 1982
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