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Investigation of High-Efficiency Vibration Energy Transducer with Dual-Modal ZnO Piezoelectric Thin Films

Published online by Cambridge University Press:  20 March 2014

Ying-Chung Chen ,
Wei-Tsai Chang ,
Chien-Chuan Cheng ,
Chun-Kai Mao  and
Kuo-Sheng Kao
Ying-Chung Chen
Affiliation:
Department of Electrical Engineering, National Sun Yat-Sen University, No.70 Lienhai Rd., Kaohsiung City, 80424, Taiwan.
Wei-Tsai Chang
Affiliation:
Department of Electrical Engineering, National Sun Yat-Sen University, No.70 Lienhai Rd., Kaohsiung City, 80424, Taiwan.
Chien-Chuan Cheng
Affiliation:
Department of Electronic Engineering, De Lin Institute of Technology, No.1, Ln. 380, Qingyun Rd., Tucheng Dist, New Taipei City, 23654, Taiwan.
Chun-Kai Mao
Affiliation:
Department of Electrical Engineering, National Sun Yat-Sen University, No.70 Lienhai Rd., Kaohsiung City, 80424, Taiwan.
Kuo-Sheng Kao*
Affiliation:
Department of Computer and Communication, Shu-Te University, No.59, Hengshan Rd., Yanchao Dist., Kaohsiung City, 82445, Taiwan. E-mail: [email protected]
*
*Email: [email protected]
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Abstract

This paper reports a novel means of integrating a high-performance dual-modal ZnO piezoelectric transducer with a flexible stainless steel substrate (SUS304) to construct dual-modal vibration-power transducers. To fabricate vibration-power transducers, the off-axis RF magnetron sputtering method for the growth of ZnO piezoelectric thin films is adopted. The stainless steel substrate has a higher Young’s modulus than those of the other substrates, and behaves the long-term stability under vibration. The transducer includes a ZnO piezoelectric thin film deposited on the stainless steel substrate combined with Pt/Ti layers at room temperature, which is fabricated by an RF magnetron two-step sputtering system. In this report, the ZnO piezoelectric thin films deposited with the tilting angle of 34° are set by controlling the deposition parameters. Scanning electron microscopy and X-ray diffraction of ZnO piezoelectric thin films reveal a rigid surface structure and a high dual-modal orientation. To investigate the generating characteristics of the dual-modal transducer, two basic experiments of longitudinal and shear modes are carried out. Based on cantilever vibration theory, the cantilever length of 1 cm and a vibration area of 1 cm2 are used to fabricate a transducer with a low resonant-frequency of 65 Hz for the natural vibration. A mass loading at the front-end of the cantilever is critical to increase the amplitude of vibration and the power generated by the piezoelectric transducer. The maximum open circuit voltage of the power transducer is 19.4 V.

Keywords

piezoelectricthin filmdevices
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1604: Symposium U – Transparent Contacts for Electronics and Renewable Energy Technologies , 2014 , jsapmrs13-1604-6590
Copyright
Copyright © Materials Research Society 2014 

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References

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